Art
J-GLOBAL ID:201902219268581449   Reference number:19S2166916

Effect of mechanical surface damage on silicon wafer strength

Author (4):
Material:
Volume: 10  Page: 1440-1445  Publication year: 2011
JST Material Number: SCOPUS  ISSN: 1877-7058 
Country of issue: United Kingdom (GBR)  Language: English (EN)

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