Art

J-GLOBAL ID：201902219683465443   Reference number：19A0330992

Upgrades of a time-of-flight elastic recoil detection analysis measurement system for thin film analysis

薄膜分析のための飛行時間弾性反跳検出分析測定システムの改良【JST・京大機械翻訳】

Author (9)： Yasuda K. (Graduate School of Life and Environmental Science, Kyoto Prefectural University, 1-5 Hangi-cho, Shimogamo, Sakyo-ku, Kyoto 606-8522, Japan) ,  Kajitori Y. (Department of Informatics and Environmental Science, Kyoto Prefectural University, 1-5 Hangi-cho, Shimogamo, Sakyo-ku, Kyoto 606-8522, Japan) ,  Oishi M. (Department of Informatics and Environmental Science, Kyoto Prefectural University, 1-5 Hangi-cho, Shimogamo, Sakyo-ku, Kyoto 606-8522, Japan) ,  Nakamura H. (Department of Informatics and Environmental Science, Kyoto Prefectural University, 1-5 Hangi-cho, Shimogamo, Sakyo-ku, Kyoto 606-8522, Japan) ,  Haruyama Y. (Graduate School of Life and Environmental Science, Kyoto Prefectural University, 1-5 Hangi-cho, Shimogamo, Sakyo-ku, Kyoto 606-8522, Japan) ,  Saito M. (Department of Nuclear Engineering, Kyoto University, Kyoto daigaku-katsura, Nishikyo-ku, Kyoto 615-8540, Japan) ,  Suzuki K. (The Wakasa Wan Energy Research Center, 64-52-1 Nagatani, Tsuruga, Fukui 914-0192, Japan) ,  Ishigami R. (The Wakasa Wan Energy Research Center, 64-52-1 Nagatani, Tsuruga, Fukui 914-0192, Japan) ,  Hibi S. (Toyota Central R&D Labs., Inc., 41-1 Yokomichi, Nagakute, Aichi 480-1192, Japan)
Material： Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms  (Nuclear Instruments and Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms)
Volume： 442  Page： 53-58  Publication year： 2019 
JST Material Number： H0899A  ISSN： 0168-583X  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： A time-of-flight elastic recoi...

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Thesaurus term： detector ,  *thin film ,  recoil ion ,  *measurement system ,  *elasticity (mechanical property) ,  energy ,  oximetry ,  *recoil ,  depth resolution ,  light element ,  *ERD Analysis ,  *flight time ,  *mechanical property
Semi thesaurus term： シリコン検出器 , 【Automatic Indexing@JST】

Author keywords (4)： Time-of-flight elastic recoil detection analysis ,  Light element analysis ,  Depth resolution ,  Sensitivity

JST classification (2)： Interactions with ions  (BK16070Z) ,  Radiochemical analysis in general  (CC06010J)

Terms in the title (3)： 飛行時間 ,  弾性反跳検出分析 ,  測定システム