Art
J-GLOBAL ID:201902219746863951   Reference number:19S0457316

Simulation-based systematic error compensation for nanoprofiler using normal vector tracing method

Author (7):
Material:
Volume: 73  Page: 473-479  Publication year: 2015 
JST Material Number: SCOPUS  ISSN: 0263-2241  CODEN: MSRMD 
Country of issue: Netherlands (NLD)  Language: English (EN)

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