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J-GLOBAL ID：201902220549687201   Reference number：19S1228222

Development of water cluster ion beam source and its application

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Author (1)：
Hiraoka, Kenzo

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(Clean Energy Research Center, University of Yamanashi)

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Material：
Journal of the Vacuum Society of Japan

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Volume： 59  Issue： 5  Page： 128-133  Publication year： 2016 
JST Material Number： SCOPUS  ISSN： 1882-2398 
Country of issue： Japan (JPN)  Language： Japanese (JA)
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ITS

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