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J-GLOBAL ID：201902220579637705   Reference number：19S0136027

A silicon nitride MIM capacitor for analog/mixed-signal integrated circuit using manufacturable atomic layer deposition equipment

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Author (4)：
Ando, Toshio

About Ando, Toshio

(Micro Device Division, Hitachi, Ltd.)

About Micro Device Division, Hitachi, Ltd.

, 
Ohta, Yosuke

About Ohta, Yosuke

(Micro Device Division, Hitachi, Ltd.)

About Micro Device Division, Hitachi, Ltd.

, 
Ashihara, Hiroshi

About Ashihara, Hiroshi

(Micro Device Division, Hitachi, Ltd.)

About Micro Device Division, Hitachi, Ltd.

, 
Imai, Toshinori

About Imai, Toshinori

(Micro Device Division, Hitachi, Ltd.)

About Micro Device Division, Hitachi, Ltd.


Material：
ECS Transactions

About ECS Transactions


Volume： 11  Issue： 7  Page： 55-60  Publication year： 2007 
JST Material Number： SCOPUS  ISSN： 1938-5862  ISBN： 9781566775731 
Country of issue： United States (USA)  Language： English (EN)
Terms in the title (1)：
Terms in the title
Keywords automatically extracted from the title.
MIM

About MIM


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