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J-GLOBAL ID：201902220850967023   Reference number：19S0491075

Waveguide-mode interference lithography technique for high contrast subwavelength structures in the visible region

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Author (7)：
Kusaka, Kanta

About Kusaka, Kanta

(Department of Physics, Tohoku University)

About Department of Physics, Tohoku University

, 
Kurosawa, Hiroyuki

About Kurosawa, Hiroyuki

(Department of Physics, Tohoku University)

About Department of Physics, Tohoku University

, 
Ohno, Seigo

About Ohno, Seigo

(Department of Physics, Tohoku University)

About Department of Physics, Tohoku University

, 
Sakaki, Yozaburo

About Sakaki, Yozaburo

(Department of Physics, Tohoku University)

About Department of Physics, Tohoku University

, 
Nakayama, Kazuyuki

About Nakayama, Kazuyuki

(Department of Physics, Tohoku University)

About Department of Physics, Tohoku University

, 
Moritake, Yuto

About Moritake, Yuto

(Department of Physics, Tohoku University)

About Department of Physics, Tohoku University

, 
Ishihara, Teruya

About Ishihara, Teruya

(Department of Physics, Tohoku University)

About Department of Physics, Tohoku University


Material：
Optics Express

About Optics Express


Volume： 22  Issue： 15  Page： 18748-18756  Publication year： 2014 
JST Material Number： SCOPUS  ISSN： 1094-4087 
Country of issue： United States (USA)  Language： English (EN)

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