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J-GLOBAL ID:201902221883495725   Reference number:19A1402288

機械学習を用いたSiC溶液成長法の熱流動の高速予測と育成条件の最適化に関する基礎検討

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Volume: 164th  Page: ROMBUNNO.S2.10  Publication year: Mar. 06, 2019 
JST Material Number: S0988B  ISSN: 2433-3093  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Manufacturing of ceramics and ceramic whiteware  ,  Crystal growth of semiconductors 

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