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J-GLOBAL ID:201902227887436106   Reference number:19A0098697

Structural Analysis of Self-Assembled Platinum-Silicide Nanostructures on Si(001) Using Ion Scattering Spectroscopy

イオン散乱分光法を用いたSi(001)上の自己集合白金-ケイ化物ナノ構造の構造解析
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Material:
Volume: 16  Page: 66-71(J-STAGE)  Publication year: 2018 
JST Material Number: U0016A  ISSN: 1348-0391  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Surface structure of semiconductors  ,  Thin films of other inorganic compounds 

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