Art
J-GLOBAL ID:201902243341474115   Reference number:19A2515852

Mossbauer spectroscopic microscope study on diffusion and segregation of Fe impurities in mc-Si wafer

MC-Siウエハ中のFe不純物の拡散と偏析に関するMoessbauer分光顕微鏡研究【JST・京大機械翻訳】
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Material:
Volume: 240  Issue:Page: 1-8  Publication year: 2019 
JST Material Number: H0639A  ISSN: 0304-3843  CODEN: HYINDN  Document type: Article
Article type: 原著論文  Country of issue: Germany, Federal Republic of (DEU)  Language: ENGLISH (EN)
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Fe diffusion and segregation p...
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Proteins and peptides in general  ,  Molecular structure 

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