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J-GLOBAL ID：201902247510344860   Reference number：19A0451539

Highly sensitive and low-crosstalk angular acceleration sensor using mirror-symmetric liquid ring channels and MEMS piezoresistive cantilevers

ミラー対称液体リングチャネルとMEMS圧電抵抗カンチレバーを用いた高感度で低漏話の角加速センサ【JST・京大機械翻訳】

Author (7)： Takahashi Hidetoshi (Department of Mechano-Informatics, Graduate School of Information Science and Technology, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan) ,  Kan Tetsuo (Department of Mechanical Engineering and Intelligent Systems, Graduate School of Informatics and Engineering, The University of Electro-Communications, 1-5-1 Chofugaoka, Chofu-shi, Tokyo, Japan) ,  Nakai Akihito (Department of Mechano-Informatics, Graduate School of Information Science and Technology, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan) ,  Takahata Tomoyuki (Department of Mechano-Informatics, Graduate School of Information Science and Technology, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan) ,  Usami Takanori (IRT Research Initiative, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan) ,  Shimoyama Isao (Department of Mechano-Informatics, Graduate School of Information Science and Technology, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan) ,  Shimoyama Isao (IRT Research Initiative, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan)
Material： Sensors and Actuators. A. Physical  (Sens Actuators A)
Volume： 287  Page： 39-47  Publication year： 2019 
JST Material Number： B0345C  ISSN： 0924-4247  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： This paper describes an angula...

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Thesaurus term： angular acceleration ,  *high sensitivity ,  *channel ,  *MEMS ,  *crosstalk(communication disturbance) ,  *sensor ,  *cantilever beam ,  crosstalk(interaction) ,  forecast ,  *symmetry ,  acceleration(ratio) ,  axial direction
Semi thesaurus term： 直線加速度 ,  加速度センサ ,  *圧電抵抗 , 【Automatic Indexing@JST】

Author keywords (3)： Angular acceleration sensor ,  Piezoresistive cantilever ,  Ring flow channel

JST classification (1)： Measuring methods and instruments of time,speed,acceleration,angular veloc?  (AD05040K)

Terms in the title (10)： ミラー ,  対称 ,  チャネル ,  MEMS ,  圧電抵抗 ,  カンチレバー ,  高感度 ,  漏話 ,  角 ,  加速