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J-GLOBAL ID:201902249447481278   Reference number:19A0610715

STEM-EELS Study of Dynamic Behavior of Helium in Si

STEM-EELS法によるSi中のHeの挙動に関する研究
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Volume: 58  Issue:Page: 89(J-STAGE)  Publication year: 2019 
JST Material Number: F0163A  ISSN: 1340-2625  CODEN: MTERE2  Document type: Article
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Irradiational changes semiconductors  ,  Metallography 
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