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J-GLOBAL ID：201902252059788301   Reference number：19A0330748

Piezoelectric properties of a near strain-free lead zirconate titanate thin films deposited on a Si substrate

Si基板上に堆積したほぼ歪のないジルコニウム酸チタン酸鉛薄膜の圧電特性【JST・京大機械翻訳】

Author (9)： Ohno Tomoya (Department of Materials Science and Engineering, Kitami Institute of Technology, 165 Kouen-chi, Kitami, Hokkaido 090-8507, Japan) ,  Fukumitsu Kentaroh (Department of Materials Science and Engineering, Kitami Institute of Technology, 165 Kouen-chi, Kitami, Hokkaido 090-8507, Japan) ,  Honda Takamasa (Department of Materials Science and Engineering, Kitami Institute of Technology, 165 Kouen-chi, Kitami, Hokkaido 090-8507, Japan) ,  Sakamoto Akinori (Department of Materials Science and Engineering, Kitami Institute of Technology, 165 Kouen-chi, Kitami, Hokkaido 090-8507, Japan) ,  Tanaka Sadaaki (Department of Materials Science and Engineering, Kitami Institute of Technology, 165 Kouen-chi, Kitami, Hokkaido 090-8507, Japan) ,  Hirai Shigeto (Department of Materials Science and Engineering, Kitami Institute of Technology, 165 Kouen-chi, Kitami, Hokkaido 090-8507, Japan) ,  Matsuda Takeshi (Department of Materials Science and Engineering, Kitami Institute of Technology, 165 Kouen-chi, Kitami, Hokkaido 090-8507, Japan) ,  Sakamoto Naonori (Research Institute of Electronics, Shizuoka University, 3-5-1, Johoku, Hamamatsu, Shizuoka 432-8561, Japan) ,  Suzuki Hisao (Research Institute of Electronics, Shizuoka University, 3-5-1, Johoku, Hamamatsu, Shizuoka 432-8561, Japan)
Material： Materials Letters  (Mater Lett)
Volume： 239  Page： 71-74  Publication year： 2019 
JST Material Number： E0935A  ISSN： 0167-577X  Document type： Article
Article type： 短報  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： Chemical solution deposition (...

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Thesaurus term： *thin film ,  *lead zirconate titanate ,  lattice distortion ,  buffer layer ,  *piezoelectricity ,  laminate structure
Semi thesaurus term： 化学溶液堆積 ,  *圧電特性 ,  *シリコンウエハ , 【Automatic Indexing@JST】

Author keywords (6)： Chemical solution deposition ,  Lattice strain ,  Multilayer structure ,  Piezoelectricity ,  Sol-gel preparation ,  Thin films

JST classification (2)： Oxide thin films  (BK14050P) ,  Piezoelectricity,pyroelectricity,electret  (BM05040M)

Terms in the title (6)： Si基板 ,  堆積 ,  歪 ,  ジルコニウム酸チタン酸鉛 ,  薄膜 ,  圧電特性