Art
J-GLOBAL ID：201902261578183534   Reference number：19A2408741

Direct bonding of LiNbO3 and SiC wafers at room temperature

室温でのLiNbO_3とSiCウエハの直接ボンディング【JST・京大機械翻訳】
Author (2)：
Takigawa Ryo

About Takigawa Ryo

(Graduate School of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan)

About Graduate School of Information Science and Electrical Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan

, 
Utsumi Jun

About Utsumi Jun

(Advanced Manufacturing System Research Center, Mitsubishi Heavy Industries Machine Tool Co., Ltd., 130 Rokujizo, Ritto-shi, Shiga 520-3080, Japan)

About Advanced Manufacturing System Research Center, Mitsubishi Heavy Industries Machine Tool Co., Ltd., 130 Rokujizo, Ritto-shi, Shiga 520-3080, Japan


Material：
Scripta Materialia  (Scr Mater)

About Scripta Materialia


Volume： 174  Page： 58-61  Publication year： 2020 
JST Material Number： B0915A  ISSN： 1359-6462  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
Abstract/Point：
Abstract/Point
Japanese summary of the article(about several hundred characters).
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Application of the surface act...
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Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
surface acoustic wave

About surface acoustic wave

, 
filter

About filter

, 
atomic beam

About atomic beam

, 
high speed

About high speed

, 
shock (mechanics)

About shock (mechanics)

, 
temperature compensation

About temperature compensation

, 
Argon

About Argon

, 
*silicon carbide

About silicon carbide

, 
amorphous state

About amorphous state

, 
high power output

About high power output

, 
bonded interface

About bonded interface

, 
heat radiation

About heat radiation

, 
beam

About beam

, 
electromagnetic wave

About electromagnetic wave

, 
wave motion

About wave motion


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
thermal radiation

About thermal radiation

, 
表面活性化

About 表面活性化

, 【Automatic Indexing@JST】
Author keywords (3)：
LiNbO3/SiC structure

About LiNbO3/SiC structure

, 
Room-temperature bonding

About Room-temperature bonding

, 
Surface activated bonding method

About Surface activated bonding method

JST classification (2)：
JST classification
Category name(code) classified by JST.
Properties of ceramics and ceramic whiteware 
(YC03030G)

About Properties of ceramics and ceramic whiteware

,  Fiber reinforced metals 
(WE04040C)

About Fiber reinforced metals

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
室温

About 室温

, 
SiC

About SiC

, 
ウエハ

About ウエハ

, 
ボンディング

About ボンディング


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