Art
J-GLOBAL ID:201902261578183534   Reference number:19A2408741

Direct bonding of LiNbO3 and SiC wafers at room temperature

室温でのLiNbO_3とSiCウエハの直接ボンディング【JST・京大機械翻訳】
Author (2):
Material:
Volume: 174  Page: 58-61  Publication year: 2020 
JST Material Number: B0915A  ISSN: 1359-6462  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Application of the surface act...
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Semi thesaurus term:
Thesaurus term/Semi thesaurus term
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Author keywords (3):
JST classification (2):
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Properties of ceramics and ceramic whiteware  ,  Fiber reinforced metals 
Terms in the title (4):
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