Art

J-GLOBAL ID：201902261855584460   Reference number：19A1873330

Dissociative reactions induced by electron impact and electron transport in TEOS vapor

TEOS蒸気中の電子衝撃と電子輸送により誘起された解離反応

Author (7)： KAWAGUCHI Satoru (Graduate School of Muroran Inst. of Technol., Hokkaido, JPN) ,  KAWAGUCHI Satoru (Japan Soc. for the Promotion of Sci., JPN) ,  HIGUCHI Hisashi (Toyko Electron Technol. Solutions Ltd, Yamanashi, JPN) ,  LI Hu (Toyko Electron Technol. Solutions Ltd, Yamanashi, JPN) ,  DENPOH Kazuki (Toyko Electron Technol. Solutions Ltd, Yamanashi, JPN) ,  TAKAHASHI Kazuhiro (Graduate School of Muroran Inst. of Technol., Hokkaido, JPN) ,  SATOH Kohki (Graduate School of Muroran Inst. of Technol., Hokkaido, JPN)
Material： Japanese Journal of Applied Physics  (JJAP)
Volume： 58  Issue： 6  Page： 066003.1-066003.9  Publication year： Jun. 2019 
JST Material Number： G0520B  ISSN： 0021-4922  CODEN： JJAPB6  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Thesaurus term： *aliphatic alcohol ,  *electron collision ,  *transport phenomenon ,  *dissociation ,  RRKM theory ,  cross section (area) ,  drift velocity ,  diffusion coefficient ,  ionization coefficient ,  inelastic scattering ,  simulation ,  fragment ,  mass spectrum ,  *electron transport ,  collision cross section ,  Monte Carlo simulation ,  velocity
Semi thesaurus term： electron impact ,  *Dissociation reaction ,  Rice-Ramsperger-Kassel-Marcus theory ,  ionization coefficient ,  inelastic collision

JST classification (1)： Electron scattering by molecules  (BH07030A)

Substance index (1)： Tetraethoxysilane

Reference (31)：

• M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, Hoboken, NJ, 2005), Chap. 16.
• T. Ichikawa, D. Ichinose, and N. Tamaoki, Toshiba Rev. 66, 29 (2011) [in Japanese].
• T. Makabe and Z. L. Petrovic, Plasma Electronics: Applications in Microelectronic Device Fabrication (CRC Press, Boca Raton, FL, 2015) 2nd ed., Chap. 7.
• M. J. Kushner, J. Phys. D: Appl. Phys. 42, 194013 (2009).
• R. E. Robson, R. D. White, and Z. L. Petrović, Rev. Mod. Phys. 77, 1303 (2005).

Terms in the title (6)： TEOS ,  蒸気 ,  電子衝撃 ,  電子輸送 ,  誘起 ,  解離反応