Art

J-GLOBAL ID：201902272425436449   Reference number：19A0183822

Response Characteristics of Silicon Microring Resonator Hydrogen Gas Sensor

シリコンマイクロリング共振器水素ガスセンサの応答特性

Author (5)： Yamasaku Naoki (Yokohama National University) ,  Matsuura Sosuke (Yokohama National University) ,  Nishijima Yoshiaki (Yokohama National University) ,  Arakawa Taro (Yokohama National University) ,  Okazaki Shinji (Yokohama National University)
Material： 電気学会論文誌 E  (IEEJ Transactions on Sensors and Micromachines)
Volume： 139  Issue： 1  Page： 2-6(J-STAGE)  Publication year： 2019 
JST Material Number： L3098A  ISSN： 1341-8939  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *ring resonator ,  *hydrogen ,  *gas sensor ,  response characteristic ,  silicon ,  holding ,  tungsten oxide ,  platinum ,  catalytic combustion ,  *resonance frequency ,  scanning probe microscope ,  high sensitivity ,  sol-gel process ,  leak detector ,  gas leakage ,  fine patterning ,  electron microscopy ,  spin coating ,  X-ray diffraction ,  composite film ,  *frequency fluctuation
Semi thesaurus term： microring resonator ,  scanning electron microscopy ,  loading ,  wavelength shift ,  positron probe microanalyzer

Author keywords (4)： MRR ,  Pt/WO3 ,  hydrogen leakage detection ,  sol-gel method

JST classification (1)： Physical analysis in general  (CC03011F)

Reference (15)：

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• (5) D. Dai and S. He : “Highly-sensitive sensor with large measurement range realized with wo cascaded-microring resonators”, Optics Communications, Vol. 279, pp. 89-93 (2007)

Terms in the title (4)： シリコン ,  マイクロリング共振器 ,  水素ガス ,  応答特性