Art

J-GLOBAL ID：201902275846245883   Reference number：19A1998029

Spatially Resolved Measurements of Metastable Atom Density and Electric Field Strength in a Microhollow Cathode Helium Plasma by Laser Absorption Spectroscopy

レーザ吸収分光法によるマイクロホロー陰極ヘリウムプラズマ中の準安定原子密度と電場強度の空間分解測定

Author (8)： UENO Keisuke (Graduate School of Engineering, Kyoto University) ,  KAMEBUCHI Kenta (Graduate School of Engineering, Kyoto University) ,  KAKUTANI Jiro (Graduate School of Engineering, Kyoto University) ,  MATSUOKA Leo (Graduate School of Engineering, Hiroshima University) ,  NAMBA Shinichi (Graduate School of Engineering, Hiroshima University) ,  FUJII Keisuke (Graduate School of Engineering, Kyoto University) ,  SHIKAMA Taiichi (Graduate School of Engineering, Kyoto University) ,  HASUO Masahiro (Graduate School of Engineering, Kyoto University)
Material： Plasma and Fusion Research (Web)  (Plasma Fusion Res (Web))
Volume： 13  Page： 3406070(J-STAGE)  Publication year： 2018 
JST Material Number： U0045A  ISSN： 1880-6821  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *hollow-cathode discharge ,  *hollow cathode ,  plasma ,  *field intensity ,  measurement ,  *space-resolved spectroscopy ,  *laser spectroscopy ,  density ,  Temperature ,  plasma sheath ,  helium plasma ,  gas temperature ,  atomic density ,  electric field measurement
Semi thesaurus term： *マイクロホロー陰極 ,  *laser absorption spectroscopy ,  準安定原子 ,  *electric field intensity

Author keywords (3)： microhollow cathode discharges ,  laser absorption spectroscopy ,  helium metastable

JST classification (3)： Discharge devices  (BJ03040P) ,  Gas discharges  (BJ03020T) ,  Plasma diagnostics  (BJ02090L)

Reference (11)：

• [1] K.H. Schoenbach et al., J. Vac. Sci. Technol. A 21, 1260 (2003).
• [2] G.J. Kim and J.K. Lee, IEEE Trans. Plasma Sci. 36, 1238 (2008).
• [3] C. Lazzaroni et al., J. Phys. D 43, 124008 (2010).
• [4] S. Namba et al., J. Appl. Phys. 110, 073307 (2011).
• [5] K. Ueno et al., Jpn. J. Appl. Phys. 17, 01AA03 (2018).

Terms in the title (7)： レーザ吸収分光法 ,  マイクロ ,  ホロー陰極 ,  ヘリウムプラズマ ,  原子密度 ,  電場強度 ,  分解