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J-GLOBAL ID：201902292160666494   Reference number：19A1112041

Degradation of Quality Factor of Superconducting Resonators by Remaining Metallic Film and Improved Fabrication Process Using Caldera Planarization

残留金属膜による超伝導共振器の品質因子の劣化とカルデラ平坦化を用いた改良製造プロセス【JST・京大機械翻訳】

Author (12)： Irimatsugawa Tomoya (National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan) ,  Yamamori Hirotake (National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan) ,  Hirayama Fuminori (National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan) ,  Nagasawa Shuichi (National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan) ,  Fujii Go (National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan) ,  Kohjiro Satoshi (National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan) ,  Sato Akira (National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan) ,  Fukuda Daiji (National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan) ,  Hidaka Mutsuo (National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan) ,  Sato Yasushi (National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan) ,  Ohno Masashi (Graduate School of Engineering, The University of Tokyo, Tokyo, Japan) ,  Takahashi Hiroyuki (Graduate School of Engineering, The University of Tokyo, Tokyo, Japan)
Material： IEEE Transactions on Applied Superconductivity  (IEEE Trans Appl Supercond)
Volume： 29  Issue： 5  Page： ROMBUNNO.1102406.1-6  Publication year： 2019 
JST Material Number： W0177A  ISSN： 1051-8223  CODEN： ITASE9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： An important figure of merit i...

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Thesaurus term： imperfection ,  *production process ,  *resonator ,  SQUID ,  multiplexer ,  palladium ,  niobium ,  *metallic thin film ,  microwave ,  science and technology ,  metal wire
Semi thesaurus term： SEM-EDX ,  *平坦化 ,  *品質因子 ,  *超伝導共振器 , 【Automatic Indexing@JST】

JST classification (3)： Mobile communication  (ND08030H) ,  Speach processing  (JE05000E) ,  Semiconductor integrated circuit  (NC03162T)

Terms in the title (7)： 残留 ,  金属膜 ,  超伝導共振器 ,  品質因子 ,  カルデラ ,  平坦化 ,  製造プロセス