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J-GLOBAL ID：202002212887076722   Reference number：20A0597946

Crystallization of TiO₂ polymorphs from RF-sputtered, amorphous thin-film precursors

RFスパッタした非晶質薄膜前駆体からのTiO_2多形の結晶化【JST・京大機械翻訳】

Author (13)： Agirseven O. (Department of Physics, Oregon State University, Corvallis, Oregon 97331, USA) ,  Rivella D. T. Jr. (Department of Physics, Oregon State University, Corvallis, Oregon 97331, USA) ,  Haggerty J. E. S. (Department of Physics, Oregon State University, Corvallis, Oregon 97331, USA) ,  Berry P. O. (Department of Physics, Oregon State University, Corvallis, Oregon 97331, USA) ,  Diffendaffer K. (Department of Physics, Oregon State University, Corvallis, Oregon 97331, USA) ,  Patterson A. (Department of Physics, Oregon State University, Corvallis, Oregon 97331, USA) ,  Kreb J. (Department of Physics, Oregon State University, Corvallis, Oregon 97331, USA) ,  Mangum J. S. (Department of Metallurgical and Materials Engineering, Colorado School of Mines, Golden, Colorado 80401, USA) ,  Gorman B. P. (Department of Metallurgical and Materials Engineering, Colorado School of Mines, Golden, Colorado 80401, USA) ,  Perkins J. D. (National Renewable Energy Laboratory, Golden, Colorado 80401, USA) ,  Chen B. R. (SLAC National Accelerator Laboratory, Menlo Park, California 94025, USA) ,  Schelhas L. T. (SLAC National Accelerator Laboratory, Menlo Park, California 94025, USA) ,  Tate J. (Department of Physics, Oregon State University, Corvallis, Oregon 97331, USA)
Material： AIP Advances (Web)
Volume： 10  Issue： 2  Page： 025109-025109-7  Publication year： 2020 
JST Material Number： U7121A  ISSN： 2158-3226  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： Crystalline TiO₂ fi...

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Thesaurus term： oxygen deficiency ,  RF sputtering ,  rutile ,  *thin film ,  crystallinity ,  monophase ,  *precursor(substance) ,  annealing(heat treatment) ,  optical absorption ,  *crystallization ,  reproducibility ,  rate of sedimentation ,  *amorphous state ,  anatase ,  pulsed laser deposition

JST classification (3)： Magnetic properties of metals  (BM06040T) ,  Magnetic materials  (NA04040H) ,  Metallic thin films  (BK14030T)

Terms in the title (5)： RFスパッタ ,  非晶質薄膜 ,  前駆体 ,  多形 ,  結晶化