Art
J-GLOBAL ID:202002215374658464   Reference number:20A0078727

Pattern dependent distortion and temperature variation in EUV mask

EUVマスクにおけるパターン依存歪と温度変化【JST・京大機械翻訳】
Author (5):
Material:
Volume: 11147  Page: 111471R-11  Publication year: 2019 
JST Material Number: D0943A  ISSN: 0277-786X  CODEN: PSISDG  Document type: Proceedings
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
Abstract/Point:
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Japanese summary of the article(about several hundred characters).
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Extreme ultraviolet lithograph...
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Semi thesaurus term:
Thesaurus term/Semi thesaurus term
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JST classification (1):
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Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
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