Art

J-GLOBAL ID：202002216337517961   Reference number：20A0785073

Improvement of characteristics of flexible Al-doped ZnO/Ag/Al-doped ZnO transparent conductive film using silver

銀を用いたフレキシブルAlドープZnO/Ag/AlドープZnO透明導電膜の特性改善【JST・京大機械翻訳】

Author (4)： Manzen Issei (Advanced Mechanical and Electronic Systems Engineering, National Institute of Technology, Kagoshima College, Kirishima 899-5193, Japan) ,  Yoshimura Yukio (Kagoshima Prefectural Institute of Industrial Technology, Kirishima 899-5105, Japan) ,  Matsubara Kazuki (Department of Electronic Control Engineering, National Institute of Technology, Kagoshima College, Kirishima 899-5193, Japan) ,  Nitta Atsushi (Department of Electronic Control Engineering, National Institute of Technology, Kagoshima College, Kirishima 899-5193, Japan)
Material： Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena  (Journal of Vacuum Science & Technology. B. Nanotechnology & Microelectronics: Materials, Processing, Measurement, & Phenomena)
Volume： 38  Issue： 2  Page： 022205-022205-7  Publication year： 2020 
JST Material Number： E0974A  ISSN： 2166-2746  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： In recent years, transparent c...

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Thesaurus term： multilayer ,  thin film ,  electron beam deposition ,  *transparent conducting thin films ,  low temperature ,  electrical resistivity ,  Indium ,  transmissivity ,  thermal oxidation ,  *Silver ,  indium tin oxide ,  optical property ,  rate of sedimentation ,  transparent conducting oxide
Semi thesaurus term： フレキシブルデバイス , 【Automatic Indexing@JST】

JST classification (2)： Manufacturing technology of solid-state devices  (NC03030V) ,  Oxide thin films  (BK14050P)

Terms in the title (5)： 銀 ,  AlドープZnO ,  Ag ,  透明導電膜 ,  特性改善