Art

J-GLOBAL ID：202002218563248902   Reference number：20A0007780

Residual stress measurement of {112}-oriented CrN layers in CrN/Cr multilayer films

CrN/Cr多層膜における{112}方位CrN層の残留応力測定【JST・京大機械翻訳】

Author (4)： Kusaka Kazuya (Institute of Technology and Science, Tokushima University, 2-1, Minamijosanjima, Tokushima, Tokushima 7708506, Japan) ,  Shirasaka Kenta (Graduate School of Advanced Technology and Science, Tokushima University, 2-1, Minamijosanjima, Tokushima, Tokushima 7708506, Japan) ,  Yonekura Daisuke (Institute of Technology and Science, Tokushima University, 2-1, Minamijosanjima, Tokushima, Tokushima 7708506, Japan) ,  Tanaka Yuta (Materials Department, Research Laboratory, IHI Corporation, 1, Shin-nakahara-cho, Isogo-ku, Yokohama, Kanagawa 235-8501, Japan)
Material： Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena  (Journal of Vacuum Science & Technology. B. Nanotechnology & Microelectronics: Materials, Processing, Measurement, & Phenomena)
Volume： 37  Issue： 6  Page： 062919-062919-6  Publication year： 2019 
JST Material Number： E0974A  ISSN： 2166-2746  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： In this work, the authors prop...

Register(free) or Log In to access     To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=20A0007780&from=J-GLOBAL&jstjournalNo=E0974A") }}

Thesaurus term： droplet ,  stress measurement ,  solid solution ,  isotropy ,  *Chromium ,  *multilayer film ,  diffraction ,  *residual stress ,  residual compressive stress ,  chromium nitride ,  vacuum arc deposition ,  measurement
Semi thesaurus term： アークイオンプレーティング , 【Automatic Indexing@JST】

JST classification (2)： Manufacturing technology of solid-state devices  (NC03030V) ,  Mechanical properties of solids in general  (BL01021C)

Terms in the title (5)： Cr ,  多層膜 ,  方位 ,  残留 ,  応力測定