About Gurin S. A.
About CJSC Medtekhnika, Penza 440018, Russia
About Pecherskaya E. A.
About Department of Information and measuring equipment and metrology, Penza State University, Penza 440026, Russia
About Fimin A.B.
About Department of Information and measuring equipment and metrology, Penza State University, Penza 440026, Russia
About Nikolaev K.O.
About Department of Information and measuring equipment and metrology, Penza State University, Penza 440026, Russia
About Shepeleva Y.V.
About Department of Information and measuring equipment and metrology, Penza State University, Penza 440026, Russia
About Artamonov D.V.
About Department of Information and measuring equipment and metrology, Penza State University, Penza 440026, Russia
About Journal of Physics: Conference Series
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About intelligent material
About sensor
About silicon dioxide
About silicon
About carbon material
About rocket
About space technology
About silicon carbide
About adaptability
About silicon nitride
About シリコンウエハ
About 一酸化ケイ素
About マイクロカンチレバー
About ヘテロ構造
About 低次元
About Semiconductor thin films
About Manufacturing technology of solid-state devices
About シリコン
About インテリジェント材料
About 炭素材料
About 低次元
About ヘテロ構造