Art

J-GLOBAL ID：202002222239395914   Reference number：20A0669648

Local electroplating deposition for free-standing micropillars using a bias-modulated scanning ion conductance microscope

バイアス変調走査イオンコンダクタンス顕微鏡を用いた自立マイクロピラーのための局所電気めっき堆積【JST・京大機械翻訳】

Author (6)： Nakazawa Kenta (Graduate School of Integrated Science and Technology, Shizuoka University, Hamamatsu, Japan) ,  Yoshioka Masayoshi (Graduate School of Integrated Science and Technology, Shizuoka University, Hamamatsu, Japan) ,  Mizutani Yusuke (Division of Microscopic Anatomy, Graduate School of Medical and Dental Sciences, Niigata University, Niigata, Japan) ,  Ushiki Tatsuo (Division of Microscopic Anatomy, Graduate School of Medical and Dental Sciences, Niigata University, Niigata, Japan) ,  Iwata Futoshi (Graduate School of Integrated Science and Technology, Shizuoka University, Hamamatsu, Japan) ,  Iwata Futoshi (Graduate School of Medical Photonics, Shizuoka University, Hamamatsu, Japan)
Material： Microsystem Technologies  (Microsystem Technologies. Micro- and Nanosystems, Information Storage and Processing Systems)
Volume： 26  Issue： 4  Page： 1333-1342  Publication year： 2020 
JST Material Number： W2056A  ISSN： 0946-7076  Document type： Article
Article type： 原著論文  Country of issue： Germany, Federal Republic of (DEU)  Language： ENGLISH (EN)

Abstract/Point： Abstract: A local electroplati...

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Thesaurus term： positioning ,  feedback control ,  direct voltage ,  nano particle ,  Copper ,  *Electroplating ,  bias ,  opening ,  *scanning ,  nanopipette
Semi thesaurus term： *マイクロピラー , 【Automatic Indexing@JST】

JST classification (1)： Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (10)： バイアス ,  変調 ,  走査 ,  イオン ,  コンダクタンス ,  顕微鏡 ,  自立 ,  マイクロピラー ,  電気めっき ,  堆積