Art
J-GLOBAL ID：202002226141495863   Reference number：20A0447246

成膜技術 9 PVD 9.3 レーザアブレーション

Author (1)：
NISHIKAWA HIROAKI

About NISHIKAWA HIROAKI

(近畿大)

About 近畿大


Material：
表面技術  (Journal of the Surface Finishing Society of Japan)

About 表面技術


Volume： 71  Issue： 2  Page： 132-133  Publication year： Feb. 01, 2020 
JST Material Number： G0441B  ISSN： 0915-1869  CODEN： HYGIEX  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*manufacturing

About manufacturing

, 
physical vapor deposition

About physical vapor deposition

, 
*laser ablation

About laser ablation

, 
principle

About principle

, 
chemical composition

About chemical composition

, 
target

About target

, 
maneuverability

About maneuverability

, 
*thin film manufacturing

About thin film manufacturing


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
maneuverability

About maneuverability


JST classification (1)：
JST classification
Category name(code) classified by JST.
Techniques and equipment of thin film deposition 
(BK14020I)

About Techniques and equipment of thin film deposition

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
成膜

About 成膜

, 
PVD

About PVD

, 
レーザアブレーション

About レーザアブレーション


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