Art
J-GLOBAL ID：202002235007394886   Reference number：20A1414937

Texture and phase control of magnetron-sputtered VO2 thin films with an Al-doped ZnO seed layer using topotactic oxidization

トポタクチック酸化を用いたAlドープZnOシード層を有するマグネトロンスパッタVO_2薄膜の集合組織と相制御【JST・京大機械翻訳】
Author (4)：
Nomoto Junichi

About Nomoto Junichi

(Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan)

About Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan

, 
Yamaguchi Iwao

About Yamaguchi Iwao

(Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan)

About Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan

, 
Nakajima Tomohiko

About Nakajima Tomohiko

(Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan)

About Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan

, 
Tsuchiya Tetsuo

About Tsuchiya Tetsuo

(Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan)

About Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan


Material：
Surface & Coatings Technology  (Surf Coat Technol)

About Surface & Coatings Technology


Volume： 394  Page： Null  Publication year： 2020 
JST Material Number： D0205C  ISSN： 0257-8972  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Abstract/Point：
Abstract/Point
Japanese summary of the article(about several hundred characters).
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Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*oxidation

About oxidation

, 
*texture (metal)

About texture (metal)

, 
electrical resistivity

About electrical resistivity

, 
*thin film

About thin film

, 
crystal orientation

About crystal orientation

, 
wavelength

About wavelength

, 
*zinc oxide

About zinc oxide

, 
stoichiometry

About stoichiometry

, 
thin film growth

About thin film growth

, 
glass substrate

About glass substrate

, 
light transmission

About light transmission


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*シード層

About シード層

, 
ポストアニーリング

About ポストアニーリング

, 【Automatic Indexing@JST】
Author keywords (7)：
Phase conversion

About Phase conversion

, 
Crystallographic texture

About Crystallographic texture

, 
VO2

About VO2

, 
Magnetron sputtering

About Magnetron sputtering

, 
Thermal annealing

About Thermal annealing

, 
Seed layer

About Seed layer

, 
ZnO

About ZnO

JST classification (1)：
JST classification
Category name(code) classified by JST.
Oxide thin films 
(BK14050P)

About Oxide thin films

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
酸化

About 酸化

, 
AlドープZnO

About AlドープZnO

, 
シード層

About シード層

, 
マグネトロンスパッタ

About マグネトロンスパッタ

, 
薄膜

About 薄膜

, 
集合組織

About 集合組織


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