Art

J-GLOBAL ID：202002238544367039   Reference number：20A0492474

Closed-Loop, Axial Temperature Control of Etched Silicon Microcolumn for Tunable Thermal Gradient Gas Chromatography

調整可能な熱勾配ガスクロマトグラフィーのためのエッチングしたシリコンマイクロカラムの閉ループ,軸方向温度制御【JST・京大機械翻訳】

Author (6)： Schnepf Parker D. (Department of Mechanical Engineering, Brigham Young University, Provo, UT, USA) ,  Davis Aaron (Department of Mechanical Engineering, Brigham Young University, Provo, UT, USA) ,  Iverson Brian D. (Department of Mechanical Engineering, Brigham Young University, Provo, UT, USA) ,  Vanfleet Richard (Department of Physics and Astronomy, Brigham Young University, Provo, UT, USA) ,  Davis Robert C. (Department of Physics and Astronomy, Brigham Young University, Provo, UT, USA) ,  Jensen Brian D. (Department of Mechanical Engineering, Brigham Young University, Provo, UT, USA)
Material： Journal of Microelectromechanical Systems  (J Microelectromechanical Syst)
Volume： 29  Issue： 1  Page： 76-85  Publication year： 2020 
JST Material Number： W0357A  ISSN： 1057-7157  CODEN： JMIYET  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： Combining the resolution of co...

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Thesaurus term： *gas chromatography ,  resolving power ,  *temperature gradient ,  gas analysis ,  thin film ,  cooling velocity ,  control system(computer) ,  heater ,  production process ,  axial direction ,  temperature control ,  high-resolution ,  fine patterning ,  temperature distribution
Semi thesaurus term： 熱制御 , 【Automatic Indexing@JST】

JST classification (2)： Gas chromatography  (CC04013U) ,  Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (4)： 熱勾配 ,  ガスクロマトグラフィー ,  エッチング ,  温度制御