Art

J-GLOBAL ID：202002238617088792   Reference number：20A0656539

Toward Thick Piezoelectric HfO₂-Based Films

厚い圧電性HfO_2ベース膜に向けて【JST・京大機械翻訳】

Author (10)： Schenk Tony (Materials Research and Technology Department, Luxembourg Institute of Science and Technology (LIST), 41 Rue du Brill, L-4422, Belvaux, Luxembourg) ,  Godard Nicolas (Materials Research and Technology Department, Luxembourg Institute of Science and Technology (LIST), 41 Rue du Brill, L-4422, Belvaux, Luxembourg) ,  Mahjoub Aymen (Materials Research and Technology Department, Luxembourg Institute of Science and Technology (LIST), 41 Rue du Brill, L-4422, Belvaux, Luxembourg) ,  Girod Stephanie (Materials Research and Technology Department, Luxembourg Institute of Science and Technology (LIST), 41 Rue du Brill, L-4422, Belvaux, Luxembourg) ,  Matavz Aleksander (Jozef Stefan International Postgraduate School, Jamova cesta 39, 1000, Ljubljana, Slovenia) ,  Matavz Aleksander (Condensed Matter Physics Department, Jozef Stefan Institute, Jamova cesta 39, SI-1000, Ljubljana, Slovenia) ,  Bobnar Vid (Jozef Stefan International Postgraduate School, Jamova cesta 39, 1000, Ljubljana, Slovenia) ,  Bobnar Vid (Condensed Matter Physics Department, Jozef Stefan Institute, Jamova cesta 39, SI-1000, Ljubljana, Slovenia) ,  Defay Emmanuel (Materials Research and Technology Department, Luxembourg Institute of Science and Technology (LIST), 41 Rue du Brill, L-4422, Belvaux, Luxembourg) ,  Glinsek Sebastjan (Materials Research and Technology Department, Luxembourg Institute of Science and Technology (LIST), 41 Rue du Brill, L-4422, Belvaux, Luxembourg)
Material： Physica Status Solidi. Rapid Research Letters  (Physica Status Solidi. RRL)
Volume： 14  Issue： 3  Page： e1900626  Publication year： 2020 
JST Material Number： W1880A  ISSN： 1862-6254  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： For HfO₂-based film...

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Thesaurus term： micro structure ,  hafnium oxide ,  sensor ,  actuator ,  piezoelectrics ,  literature search ,  nucleation ,  electron microscopy ,  gel ,  scanning ,  scanning electron microscope ,  *piezoelectricity ,  polarization (phenomenon) ,  X-Ray Diffraction ,  thick film ,  optimization ,  modification

Author keywords (5)： chemical solution deposition ,  ferroelectric HfO2 ,  piezoelectrics ,  sol-gel ,  thick films

JST classification (2)： Oxide thin films  (BK14050P) ,  Metal-insulator-semiconductor structures  (BM03085X)

Terms in the title (1)： 圧電性