Art
J-GLOBAL ID:202002238617088792   Reference number:20A0656539

Toward Thick Piezoelectric HfO2-Based Films

厚い圧電性HfO_2ベース膜に向けて【JST・京大機械翻訳】
Author (10):
Material:
Volume: 14  Issue:Page: e1900626  Publication year: 2020 
JST Material Number: W1880A  ISSN: 1862-6254  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
Abstract/Point:
Abstract/Point
Japanese summary of the article(about several hundred characters).
All summary is available on JDreamIII(charged).
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For HfO2-based film...
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Thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
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On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.

JST classification (2):
JST classification
Category name(code) classified by JST.
Oxide thin films  ,  Metal-insulator-semiconductor structures 
Terms in the title (1):
Terms in the title
Keywords automatically extracted from the title.

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