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J-GLOBAL ID：202002244261878748   Reference number：20A0019751

Fabrication of absorbing Nb-Ti suboxide anti-reflective thin film stacks

吸収性Nb-Tiサブ酸化物反射防止薄膜スタックの作製【JST・京大機械翻訳】

Author (4)： Shimabukuro Adam E. (Department of Materials Science and Engineering, College of Engineering, University of Washington, Seattle 98195, USA) ,  Ishii Akihiro (Department of Materials Science, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan) ,  Takamura Hitoshi (Department of Materials Science, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan) ,  Ohuchi Fumio S. (Department of Materials Science and Engineering, College of Engineering, University of Washington, Seattle 98195, USA)
Material： Results in Physics
Volume： 15  Page： Null  Publication year： 2019 
JST Material Number： W3368A  ISSN： 2211-3797  Document type： Article
Article type： 短報  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： Optically black anti-reflectiv...

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Thesaurus term： *thin film ,  absorption coefficient ,  spectrum ,  stray light ,  flat panel display ,  angle of incidence ,  reflectivity ,  covering ,  multilayer ,  image technology ,  pulsed laser deposition ,  optical constant ,  antireflection film ,  absorbance ,  *oxide

Author keywords (4)： Pulsed laser deposition ,  Anti-reflective coating ,  Suboxide ,  Absorbing coating

JST classification (5)： Radiation shielding  (MB04000R) ,  Oxide thin films  (BK14050P) ,  Magnetic properties of oxides  (BM06050E) ,  Fusion devices  (BJ02083Z) ,  Properties of ceramics and ceramic whiteware  (YC03030G)

Terms in the title (8)： Nb ,  Ti ,  サブ ,  酸化物 ,  反射防止 ,  薄膜 ,  スタック ,  作製