Art

J-GLOBAL ID：202002248933122966   Reference number：20A0419652

A dual-scanning white-light interferometer for exact thickness measurement of a large-thickness glass plate

大厚ガラス板の正確な厚み測定のための二重走査白色光干渉計【JST・京大機械翻訳】

Author (7)： Zhang Kaining (Fujian Provincial Key Laboratory of Light Propagation and Transformation, College of Information Science and Engineering, Huaqiao University, Xiamen, Fujian 361021, People’s Republic of China) ,  Sasaki Osami (Fujian Provincial Key Laboratory of Light Propagation and Transformation, College of Information Science and Engineering, Huaqiao University, Xiamen, Fujian 361021, People’s Republic of China) ,  Sasaki Osami (Niigata University, Niigata 950-2181, Japan) ,  Luo Songjie (Niigata University, Niigata 950-2181, Japan) ,  Suzuki Takamasa (Niigata University, Niigata 950-2181, Japan) ,  Liu Yongxin (Fujian Provincial Key Laboratory of Light Propagation and Transformation, College of Information Science and Engineering, Huaqiao University, Xiamen, Fujian 361021, People’s Republic of China) ,  Pu Jixiong (Fujian Provincial Key Laboratory of Light Propagation and Transformation, College of Information Science and Engineering, Huaqiao University, Xiamen, Fujian 361021, People’s Republic of China)
Material： Measurement Science and Technology  (Meas Sci Technol)
Volume： 31  Issue： 4  Page： 045009 (5pp)  Publication year： 2020 
JST Material Number： C0354C  ISSN： 0957-0233  CODEN： MSTCEP  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Abstract/Point： Conventional scanning white-li...

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Thesaurus term： *flat glass ,  *scanning ,  arm(machine element) ,  time course ,  thickness measurement ,  measurement error
Semi thesaurus term： 光路差 ,  圧電変換器 ,  *光干渉計 , 【Automatic Indexing@JST】

JST classification (2)： Interferometry and interferometers  (BD07070G) ,  Measuring methods and instruments of other thermal variables  (AD06040R)

Terms in the title (6)： 厚 ,  ガラス板 ,  厚み測定 ,  二重走査 ,  白色 ,  光干渉計