Art
J-GLOBAL ID：202002254992629195   Reference number：20A0898363

Surface activation of Au films using ultraviolet irradiation for low-temperature bonding in air

空気中での低温接着に対する紫外線照射を使用したAu膜の表面活性化
Author (2)：
TAKIGAWA Ryo

About TAKIGAWA Ryo

(Kyushu Univ., Fukuoka, JPN)

About Kyushu Univ., Fukuoka, JPN

, 
KANAYA Haruichi

About KANAYA Haruichi

(Kyushu Univ., Fukuoka, JPN)

About Kyushu Univ., Fukuoka, JPN


Material：
バイオメカニクス研究センター&エレクトロニクス実装学会九州支部合同研究会  (Proceedings. Joint Conference of the Research Center for Advanced Biomechanics & Japan Institute of Electronics Packaging, Kyushu Branch)

About バイオメカニクス研究センター&エレクトロニクス実装学会九州支部合同研究会


Volume： 8th  Page： 49  Publication year： 2019 
JST Material Number： F2186A  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
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*adhesion(bond)

About adhesion(bond)

, 
*ultraviolet irradiation

About ultraviolet irradiation

, 
MEMS

About MEMS

, 
metallic thin film

About metallic thin film

, 
*low temperature

About low temperature

, 
mercury lamp

About mercury lamp

, 
experiment

About experiment

, 
atmosphere(location)

About atmosphere(location)


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
gold film

About gold film

, 
*surface activation

About surface activation

, 
surface-activated bonding

About surface-activated bonding


JST classification (3)：
JST classification
Category name(code) classified by JST.
Bonding 
(WC07020V)

About Bonding

,  Special machining 
(QC04000Y)

About Special machining

,  Other surface treatment 
(WC08070F)

About Other surface treatment

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
空気中

About 空気中

, 
低温

About 低温

, 
紫外線照射

About 紫外線照射

, 
Au

About Au

, 
表面活性化

About 表面活性化


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