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J-GLOBAL ID：202002256140976634   Reference number：20A0123783

Effects of periods on the evolution of microstructure and mechanical properties of multilayered Cu-W films during thermal annealing

熱アニーリング中の多層Cu-W膜の微細構造と機械的性質の進展に及ぼす周期の影響【JST・京大機械翻訳】

Author (8)： Xue Jiawei (State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Xi’an, Shannxi 710049, China) ,  Li Yanhuai (State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Xi’an, Shannxi 710049, China) ,  Gao Leiwen (State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Xi’an, Shannxi 710049, China) ,  Qian Dan (State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Xi’an, Shannxi 710049, China) ,  Song Zhongxiao (State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Xi’an, Shannxi 710049, China) ,  Wang Xiaohua (State Key Laboratory of Electrical Insulation and Power Equipment, Xi’an Jiaotong University, 710049, China) ,  Zhu Xiaodong (State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Xi’an, Shannxi 710049, China) ,  Chen Jian (School of Materials Science and Engineering, Southeast University, Nanjing, Jiangsu 211189, China)
Material： Surface & Coatings Technology  (Surf Coat Technol)
Volume： 381  Page： Null  Publication year： 2020 
JST Material Number： D0205C  ISSN： 0257-8972  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： Benefiting from the unique str...

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Thesaurus term： *copper ,  diffusion barrier ,  multilayer film ,  interface(surface) ,  spinodal decomposition ,  high temperature ,  rotational frequency ,  *annealing(heat treatment) ,  thermal resistance ,  fracture toughness ,  radiation resistance(radiation effect) ,  *mechanical property ,  coherence ,  phase separation ,  multistory structure

Author keywords (6)： Cu-W films ,  Multilayered structure ,  Thermal annealing ,  Modulation period ,  Thermal stability ,  Mechanical properties

JST classification (3)： Metallic thin films  (BK14030T) ,  Thin films of other inorganic compounds  (BK14060A) ,  Glass and ceramic coating in general  (YC02010D)

Terms in the title (7)： 熱アニーリング ,  多層 ,  Cu ,  微細構造 ,  機械的性質 ,  進展 ,  周期