Art

J-GLOBAL ID：202002261549280356   Reference number：20A0763578

Excimer laser annealing method for achieving low electrical resistivity and high work function in transparent conductive amorphous In₂O₃:Zn films on a polyethylene terephthalate substrate

ポリエチレンテレフタレート基板上の透明導電性非晶質In_2O_3:Zn膜における低電気抵抗率と高仕事関数を達成するためのエキシマレーザアニーリング法【JST・京大機械翻訳】

Author (5)： Nomoto Junichi (Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan) ,  Yamaguchi Iwao (Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan) ,  Nakajima Tomohiko (Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan) ,  Matsubayashi Yasuhito (Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan) ,  Tsuchiya Tetsuo (Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 5-2, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan)
Material： Thin Solid Films
Volume： 698  Page： Null  Publication year： 2020 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： We have developed an excimer l...

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Thesaurus term： crack ,  *work function ,  *electrical resistivity ,  thermal expansion ,  Oxygen ,  Carbon ,  covering ,  *polyethylene terephthalate ,  *excimer ,  *amorphous state ,  carrier density ,  *laser annealing ,  *excimer laser ,  *conductive property ,  *aromatic polyester
Semi thesaurus term： レーザフルエンス , 【Automatic Indexing@JST】

Author keywords (4)： Excimer laser annealing ,  Transparent conducting oxide ,  Work function control ,  Buffer layer

JST classification (2)： Laser irradiation effects and damages  (BK16040S) ,  Semiconductor thin films  (BK14040E)

Terms in the title (8)： ポリエチレンテレフタレート ,  導電性 ,  非晶質 ,  Zn ,  電気抵抗率 ,  仕事関数 ,  エキシマレーザ ,  アニーリング法