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J-GLOBAL ID:202002262237098812   Reference number:20A0076321

Stereometric Analysis of Effects of Heat Stressing on Micromorphology of Si Single Crystals

Si単結晶の微細形態に及ぼす熱応力の影響の立体測定解析【JST・京大機械翻訳】
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Volume: 11  Issue:Page: 2945-2959  Publication year: 2019 
JST Material Number: W4947A  ISSN: 1876-9918  Document type: Article
Article type: 原著論文  Country of issue: Germany, Federal Republic of (DEU)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices  ,  Lattice defects in semiconductors  ,  Microscopy determination of structures  ,  Surface structure of solids in general  ,  Surface structure of semiconductors 
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