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J-GLOBAL ID:202002267883778468   Reference number:20A1993343

Study on novel nano fine particles based on the fullerene structure for CMP on hard to process material

難加工研磨におけるフラーレン結合型機能性ナノ微粒子に関する研究
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Volume: 2020  Page: ROMBUNNO.D08  Publication year: Aug. 21, 2020 
JST Material Number: L0894B  Document type: Proceedings
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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