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J-GLOBAL ID:202002268852946986   Reference number:20A2236875

Simultaneous measurement of atomic oxygen and ozone densities under pure oxygen short-gapped discharge

極短ギャップ純酸素放電における酸素原子とオゾンの同時密度計測
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Volume: 67th  Page: ROMBUNNO.12p-A302-5  Publication year: Feb. 28, 2020 
JST Material Number: Y0054B  ISSN: 2758-4704  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Gas discharges  ,  Plasma diagnostics 
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