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J-GLOBAL ID:202002276440461645   Reference number:20A0117351

Subjects to Be Overcome for Innovation of Novel Vacuum Integrated Circuits with Miniaturized Electron Sources

微小電子源を用いた真空集積回路創成のための技術的課題
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Volume: 119  Issue: 305(ED2019 59-75)  Page: 29-30  Publication year: Nov. 14, 2019 
JST Material Number: S0532B  ISSN: 0913-5685  Document type: Proceedings
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Electron and ion sources  ,  Semiconductor integrated circuit 
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