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J-GLOBAL ID：202002276914165532   Reference number：20A0377961

Electrical resistivity and mechanical properties of nitrogen-containing diamondlike carbon/tungsten and nitrogen-containing diamondlike carbon/tungsten carbide multilayer films prepared under low substrate temperature

低基板温度下で作製した窒素含有ダイヤモンド状炭素/タングステンと窒素含有ダイヤモンド状炭素/炭化タングステン多層膜の電気抵抗率と機械的性質【JST・京大機械翻訳】

Author (12)： Tamekuni Koki (Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku, Toyohashi, Aichi 4418580, Japan) ,  Harigai Toru (Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku, Toyohashi, Aichi 4418580, Japan) ,  Toya Takafumi (Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku, Toyohashi, Aichi 4418580, Japan) ,  Takikawa Hirofumi (Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku, Toyohashi, Aichi 4418580, Japan) ,  Tanimoto Tsuyoshi (National Institute of Technology, Kochi College, 200-1 Monobe, Nankoku, Kochi 7838508, Japan) ,  Takago Shigeki (Industrial Research Institute of Ishikawa, 2-1 Shunsuki, Kanazawa, Ishikawa 9208203, Japan) ,  Yasui Haruyuki (Industrial Research Institute of Ishikawa, 2-1 Shunsuki, Kanazawa, Ishikawa 9208203, Japan) ,  Kaneko Satoru (Kanagawa Institute of Industrial Science and Technology, 705-1 Shimoimaizumi, Ebina, Kanagawa 2430435, Japan) ,  Kunitsugu Shinsuke (Industrial Technology Center of Okayama Prefecture, 5301 Yoshiga, Kitaku, Okayama, Okayama 7011296, Japan) ,  Kamiya Masao (Itoh Optical Industrial Co., Ltd., 3-19 Miyanarityo, Gamagori, Aichi 443004, Japan) ,  Taki Makoto (Onward Ceramic Coating Co., Ltd., wa-13 Yoshiharatyo, Nomi, Ishikawa 9290111, Japan) ,  Gonda Hidenobu (OSG Coating Service Co., Ltd., 149 Ichinomiyamae, Toyokawa, Aichi 4411231, Japan)
Material： Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena  (Journal of Vacuum Science & Technology. B. Nanotechnology & Microelectronics: Materials, Processing, Measurement, & Phenomena)
Volume： 38  Issue： 1  Page： 011801-011801-7  Publication year： 2020 
JST Material Number： E0974A  ISSN： 2166-2746  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： Nitrogen-containing diamondlik...

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Thesaurus term： *multilayer film ,  *substrate temperature ,  *Tungsten ,  polishing (machining) ,  mechanical property ,  abrasion resistance ,  filtering ,  *electrical resistivity ,  *tungsten carbide ,  *Nitrogen ,  buffer layer ,  *diamond-like carbon ,  magnetron sputtering ,  nonequilibrium state ,  monolayer film ,  machining ,  property ,  resistance (endure)

JST classification (1)： Metallic thin films  (BK14030T)

Terms in the title (9)： 基板温度 ,  作製 ,  窒素 ,  ダイヤモンド状炭素 ,  タングステン ,  炭化タングステン ,  多層膜 ,  電気抵抗率 ,  機械的性質