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J-GLOBAL ID：202002283217688646   Reference number：20A1236163

Evolution of implicate order from amorphous to polycrystalline Sn-doped In₂O₃ films determined by in situ two-dimensional X-ray diffraction measurements

その場二次元X線回折測定により決定した非晶質から多結晶SnドープIn₂O₃膜への内在秩序の進展

Author (9)： Furubayashi Yutaka (Materials Design Center, Research Institute, Kochi University of Technology, Tosayamadacho-Miyanokuchi 185, Kami 782-8502, Japan) ,  Kobayashi Shintaro (Rigaku Cooperation, Matsubaracho 3-9-12, Akishima 196-8666, Japan) ,  Maehara Makoto (Industrial Equipment Division, Sumitomo Heavy Industries, Ltd., Soubiraki-cho 5-2, Niihama 792-8588, Japan) ,  Ishikawa Kazuhiko (Rigaku Cooperation, Matsubaracho 3-9-12, Akishima 196-8666, Japan) ,  Inaba Katsuhiko (Rigaku Cooperation, Matsubaracho 3-9-12, Akishima 196-8666, Japan) ,  Sakemi Toshiyuki (Technology Research Center, Sumitomo Heavy Industries, Ltd., Natsushimacho 19, Yokosuka 237-8555, Japan) ,  Kitami Hisashi (Materials Design Center, Research Institute, Kochi University of Technology, Tosayamadacho-Miyanokuchi 185, Kami 782-8502, Japan) ,  Kitami Hisashi (Technology Research Center, Sumitomo Heavy Industries, Ltd., Natsushimacho 19, Yokosuka 237-8555, Japan) ,  Yamamoto Tetsuya (Materials Design Center, Research Institute, Kochi University of Technology, Tosayamadacho-Miyanokuchi 185, Kami 782-8502, Japan)
Material： Applied Physics Express  (APEX)
Volume： 13  Issue： 6  Page： 065502 (5pp)  Publication year： Jun. 2020 
JST Material Number： F0599C  ISSN： 1882-0778  CODEN： APEPC4  Document type： Article
Article type： 短報  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Thesaurus term： *in situ observation ,  *X-Ray Diffraction ,  amorphous state ,  polycrystal ,  *tin ,  *doping ,  *indium oxide ,  annealing (heat treatment) ,  phase transition ,  substrate (plate) ,  *ordering ,  fine particle ,  preferred orientation ,  crystal face ,  crystal grain ,  long-range order ,  temperature of crystallization ,  glass substrate
Semi thesaurus term： post annealing ,  *ordering ,  long-distance order ,  crystallization temperature

JST classification (1)： Semiconductor thin films  (BK14040E)

Terms in the title (6)： X線回折 ,  非晶質 ,  多結晶 ,  Sn ,  ドープ ,  進展