Art

J-GLOBAL ID：202002287293677672   Reference number：20A0948767

High-Speed Imaging of a Laser Ablation Process Using Parallel Phase-Shifting Interferometry

並列位相シフト干渉法を用いたレーザアブレーションプロセスの高速イメージング

Author (7)： YASUDA Koichiro (Graduate School for Creation of New Photonics Ind., Shizuoka, JPN) ,  YASUDA Koichiro (DENSO CORP., Aichi, JPN) ,  TAKAGI Ryota (DENSO CORP., Aichi, JPN) ,  ISHII Katsuhiro (Graduate School for Creation of New Photonics Ind., Shizuoka, JPN) ,  FUJITA Kazuhisa (Graduate School for Creation of New Photonics Ind., Shizuoka, JPN) ,  SHIRAI Hideaki (DENSO CORP., Aichi, JPN) ,  TSUBOI Akihiko (Graduate School for Creation of New Photonics Ind., Shizuoka, JPN)
Material： Journal of Laser Micro/Nanoengineering (Web)  (J Laser Micro Nanoeng (Web))
Volume： 14  Issue： 3  Page： 220-225 (WEB ONLY)  Publication year： Dec. 2019 
JST Material Number： U0377A  ISSN： 1880-0688  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *interferometry ,  phase shift ,  *laser ablation ,  imaging ,  image processing ,  fast algorithm ,  speedup ,  pulsed laser ,  pulse duration ,  frequency(Hz) ,  spatial distribution ,  visualization ,  characterization
Semi thesaurus term： *phase shift interferometry ,  loading frequency ,  fast imaging ,  short pulse laser

JST classification (2)： Laser irradiation effects and damages  (BK16040S) ,  Interferometry and interferometers  (BD07070G)

Reference (33)：

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• D.W. Bäuerle: Laser processing and chemistry, (Springer, Berlin, 2013) p.279.

Terms in the title (4)： 位相シフト干渉法 ,  レーザアブレーション ,  プロセス ,  高速イメージング