Art

J-GLOBAL ID：202002291343029539   Reference number：20A2627004

Effect of forming gas annealing on improvement in crystal orientation of solid-phase calcined CuCrO₂ thin film

固相焼成CuCrO_2薄膜の結晶方位の改善に及ぼす形成ガスアニーリングの効果【JST・京大機械翻訳】

Author (4)： Ohno Kotaro (Department of Electronic Engineering, Graduate School of Engineering, Tohoku University, 6-6-05 Aza-Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan) ,  Okada Takeru (Department of Electronic Engineering, Graduate School of Engineering, Tohoku University, 6-6-05 Aza-Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan) ,  Kawashima Tomoyuki (Department of Electronic Engineering, Graduate School of Engineering, Tohoku University, 6-6-05 Aza-Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan) ,  Washio Katsuyoshi (Department of Electronic Engineering, Graduate School of Engineering, Tohoku University, 6-6-05 Aza-Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan)
Material： Thin Solid Films
Volume： 714  Page： Null  Publication year： 2020 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： Effect of forming gas (mixture...

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Thesaurus term： optical property ,  mixed gas ,  *annealing (heat treatment) ,  electrical resistivity ,  *thin film ,  Argon ,  *crystal orientation ,  amorphous state ,  calcinating ,  *solid phase ,  oxygen vacancy ,  nitrogen gas ,  light transmission ,  *phase (thermodynamics)
Semi thesaurus term： フォーミングガス , 【Automatic Indexing@JST】

Author keywords (7)： Calcination ,  Optical properties ,  Electrical properties ,  Delafossite ,  Crystallinity ,  Transparent conductive oxide ,  Copper-chromium oxide

JST classification (1)： Oxide thin films  (BK14050P)

Terms in the title (4)： 固相 ,  焼成 ,  薄膜 ,  結晶方位