Rchr

J-GLOBAL ID：202101018191621484 Update date: Apr. 02, 2025

Yuito Takashi

Yuito Takashi

Papers (10)：

Takaya Higashino, Naho Yanase, Takahiro Kurashima, Shintaro Tsuchihashi, Takashi Yuito, Andreas Flanschger, Kubo Noritsugu, Motofumi Tanaka, Noritsugu Miyata, Yasunobu Oka. Application of Riblets to Wind Turbine Blades. AIAA SCITECH 2025 Forum. 2025
S. Tsuchihashi M. Nakayama, T. Yuito, K. Naito, G. Ichinose, T. Amazawa, T. Oyama, Y. Kato, P. Leitl, A. Flanschger, A. Rodriguez, et al. Experimental investigation of the effect of laser processed riblet on improvement of the race car performance. AIAA SCITECH 2024 Forum. 2024
Takashi Yuito, Masaru Sasago, Yoshihiko Hirai. Computational study of the focus monitoring with sub-wavelength grating in optical lithography. Journal of Photopolymer Science and Technology. 2020. 33. 1. 57-62
Takashi Matsuda, Shigeo Irie, Tadami Shimizu, Takashi Yuito, Yasuko Tabata, Yuuji Nonami, Akio Misaka, Taichi Koizumi, Masaru Sasago. Mask enhancer technology with source mask optimization (SMO) for 2Xnm-node logic layout gate fabrication. Proceedings of SPIE - The International Society for Optical Engineering. 2011. 7973
Takashi Yuito, Akio Misaka, Masaru Sasago. Fundamental study of the mask topography effect on the advanced phase-shifting masks for next-generation lithography. Japanese Journal of Applied Physics. 2010. 49. 6 PART 2

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MISC (1)：

由比藤崇. リソグラフィ装置. 電子材料. 2007

Lectures and oral presentations (5)：

Novel laser processed riblet film for aircraft to improve fuel efficiency and CO2 emissions reduction
(INTAIRCOAT 2023 2023)
45nm-node lithography by using Mask Enhancer
(電子情報通信学会技術研究報告 2005)
Mask enhancer technology on ArF immersion tool for 45nm-node CMOS with 0.249μm<sup>2</sup> SRAM contact layer fabrication
(Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference 2005)
エンハンサーマスクを用いた異サイズコンタクトホールの同時形成
(応用物理学関係連合講演会講演予稿集 2004)
Impact of mask enhancer on 65-nm node contacts
(Digest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003 2003)

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