Proj
J-GLOBAL ID:202104000303729059  Research Project code:17940724

多周期積層厚膜の微細構造制御に向けた囲い込み加熱機構の開発

多周期積層厚膜の微細構造制御に向けた囲い込み加熱機構の開発
National award number:JPMJTM17DD
Study period:2017 -
Organization (1):
Principal investigator: ( , 工学研究科, 教授 )
DOI: https://doi.org/10.52926/JPMJTM17DD
Terms in the title (4):
Terms in the title
Keywords automatically extracted from the title.
Research program:
Organization with control over the research:
Japan Science and Technology Agency

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