Proj
J-GLOBAL ID:202104001714864786  Research Project code:7700001940

低誘電率BCN膜成膜装置

低誘電率BCN膜成膜装置
National award number:JPMJTT0414
Study period:2004 -
Organization (2):
Principal investigator: ( , 大学院工学研究科, 教授 )
Corporate responsibility:
DOI: https://doi.org/10.52926/JPMJTT0414
Terms in the title (2):
Terms in the title
Keywords automatically extracted from the title.
Research program:
Organization with control over the research:
Japan Science and Technology Agency

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