Proj
J-GLOBAL ID：202104002467591506  Research Project code：7700400657

超LSI銅配線層に用いる新しいメッキ液の開発

超LSI銅配線層に用いる新しいメッキ液の開発
Study period：2001 -
Organization (1)：
森田化学工業株式会社

About 森田化学工業株式会社


Corporate responsibility：
森田化学工業株式会社

About 森田化学工業株式会社


Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
LSI

About LSI

, 
銅

About 銅

, 
配線層

About 配線層

, 
メッキ液

About メッキ液

, 
開発

About 開発

Research program：
Industry-Academia Collaborative R&D

About Industry-Academia Collaborative R&D

＞
R&D Programs Focused on Technology Transfer

About R&D Programs Focused on Technology Transfer

＞
Programs dosed application by FY2008

About Programs dosed application by FY2008

＞
Promoting business using advanced technology Development of Creative Technology Seeds

About Promoting business using advanced technology Development of Creative Technology Seeds

＞
Modeling of Innovative Research results

About Modeling of Innovative Research results


Organization with control over the research：
Japan Science and Technology Agency

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