Proj
J-GLOBAL ID:202104005374395250  Research Project code:7700002043

触媒CVDによるシリコン成膜装置

触媒CVDによるシリコン成膜装置
National award number:JPMJTT9708
Study period:1997 -
Organization (2):
Principal investigator: ( )
Corporate responsibility:
Research program:
Organization with control over the research:
Japan Science and Technology Agency

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