Proj
J-GLOBAL ID：202104005817225345  Research Project code：7700400242

ドライ現像できるポジ型電子線レジストの作製

ドライ現像できるポジ型電子線レジストの作製
Study period：1998 -
Organization (1)：
シンジーテック株式会社

About シンジーテック株式会社


Corporate responsibility：
シンジーテック株式会社

About シンジーテック株式会社


Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
現像

About 現像

, 
電子線レジスト

About 電子線レジスト

, 
作製

About 作製

Research program：
Industry-Academia Collaborative R&D

About Industry-Academia Collaborative R&D

＞
R&D Programs Focused on Technology Transfer

About R&D Programs Focused on Technology Transfer

＞
Programs dosed application by FY2008

About Programs dosed application by FY2008

＞
Promoting business using advanced technology Development of Creative Technology Seeds

About Promoting business using advanced technology Development of Creative Technology Seeds

＞
Modeling of Innovative Research results

About Modeling of Innovative Research results


Organization with control over the research：
Japan Science and Technology Agency

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