Proj
J-GLOBAL ID:202104006769490348  Research Project code:7700400330

SiC薄膜高温高感度圧力センサ

SiC薄膜高温高感度圧力センサ
Study period:1999 -
Organization (1):
Corporate responsibility:
Terms in the title (4):
Terms in the title
Keywords automatically extracted from the title.
Research program:
Organization with control over the research:
Japan Science and Technology Agency

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