Proj
J-GLOBAL ID:202104007849121730  Research Project code:18088585

制御低速酸素アニオンラジカル偏向収束ビームを用いた上質な原子層堆積膜生成の検証

制御低速酸素アニオンラジカル偏向収束ビームを用いた上質な原子層堆積膜生成の検証
National award number:JPMJTM18DL
Study period:2018 -
Organization (1):
Principal investigator: ( , 電気電子工学系, 准教授 )
DOI: https://doi.org/10.52926/JPMJTM18DL
Research program:
Organization with control over the research:
Japan Science and Technology Agency

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