Proj
J-GLOBAL ID:202104008256287990  Research Project code:18066776

ナノ配線を利用した電気抵抗温度依存性の小さな静電チャック用材料の開発

ナノ配線を利用した電気抵抗温度依存性の小さな静電チャック用材料の開発
National award number:JPMJTM18AN
Study period:2018 -
Organization (1):
Principal investigator: ( , 創造工学部, 教授 )
DOI: https://doi.org/10.52926/JPMJTM18AN
Terms in the title (4):
Terms in the title
Keywords automatically extracted from the title.
Research program:
Organization with control over the research:
Japan Science and Technology Agency

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