Proj
J-GLOBAL ID:202104008928702222  Research Project code:17938000

極微量長尺異方性ナノ導電相による半導体製造装置用耐プラズマ性導電材料の開発

極微量長尺異方性ナノ導電相による半導体製造装置用耐プラズマ性導電材料の開発
National award number:JPMJTM17AL
Study period:2017 -
Organization (1):
Principal investigator: ( , 工学部, 准教授 )
DOI: https://doi.org/10.52926/JPMJTM17AL
Research program:
Organization with control over the research:
Japan Science and Technology Agency

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